Microelectromechanical Sensors Based on Magnetoresistance

Microelectromechanical sensors based on magnetoresistance have been proposed. Like other microelectromechanical sensors, these would be used to measure physical quantities that can be made to manifest themselves in small mechanical displacements. Potential applications for microelectromechanical sensors include accelerometers, magnetometers, bolometers, pressure sensors, seismometers, Golay cells, and microphones. Potential markets include the aerospace, biomedical, semiconductor, automotive, and defense industries.