Method of Forming Textured Silicon Substrate by Maskless Cryogenic Etching

NASA’s Jet Propulsion Laboratory has developed an advanced energy-storage device to accommodate portable devices, minimize emissions from automobiles, and enable more challenging space missions. The use of silicon for the anode of lithium ion (Li-ion) batteries is attractive because silicon has the highest theoretical charge capacity of any material when used as an anode in a Li-ion battery. Conventional silicon anodes undergo large-volume expansions and contractions with the absorption and desorption of Li-ions, however, and this results in pulverization of the anode after several charge and discharge cycles. JPL’s innovative Li-ion battery anodes are made of micro-textured silicon, which is able to accommodate the stress of expansion and contraction during the charging cycle. These robust silicon anodes make high-capacity, rapid-charge-rate Li-ion batteries practical.