MEMS Resettable Circuit Breaker and Switch for DC-DC Voltage Converters

TBMG-8845

12/01/2010

Abstract
Content

Resettable circuit breaker cantilevers use silicon dioxide (SiO2) for temper ature compensation. The compressive stress in the SiO2 causes the cantilever to bow upwards 400 μm after release. In the DC-DC voltage converter, the gap between the electrodes is 1.4 μm. After release, the cantilevers are stuck down. A short-loop experiment was conducted to better understand the cantilever behavior by omitting the contact metal and SiO2 layers from test cantilevers.

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Citation
"MEMS Resettable Circuit Breaker and Switch for DC-DC Voltage Converters," Mobility Engineering, December 1, 2010.
Additional Details
Publisher
Published
Dec 1, 2010
Product Code
TBMG-8845
Content Type
Magazine Article
Language
English