MEMS Resettable Circuit Breaker and Switch for DC-DC Voltage Converters
TBMG-8845
12/01/2010
- Content
Resettable circuit breaker cantilevers use silicon dioxide (SiO2) for temper ature compensation. The compressive stress in the SiO2 causes the cantilever to bow upwards 400 μm after release. In the DC-DC voltage converter, the gap between the electrodes is 1.4 μm. After release, the cantilevers are stuck down. A short-loop experiment was conducted to better understand the cantilever behavior by omitting the contact metal and SiO2 layers from test cantilevers.
- Citation
- "MEMS Resettable Circuit Breaker and Switch for DC-DC Voltage Converters," Mobility Engineering, December 1, 2010.