MEMS Design Optimization With FEA

This report examines design considerations in one of the most promising new areas of engineering – Micro Electro Mechanical Systems (MEMS). Designing and optimizing MEMS devices involves unique challenges, including analyzing the inter- dependent physical phenomena to which MEMS devices are sensitive and working with small-scale geometry. A discussion of the necessary steps to model a MEMS micro-heater for an automotive gas sensor array that can withstand high temperatures is presented in this article.