Low-Dead-Volume Inlet for Vacuum Chamber

Gas introduction from near-ambient pressures to high vacuum traditionally is accomplished either by multi-stage differential pumping that allows for very rapid response, or by a capillary method that allows for a simple, single-stage introduction, but which often has a delayed response. Another means to introduce the gas sample is to use the multi-stage design with only a single stage. This is accomplished by using a very small conductance limit. The problem with this method is that a small conductance limit will amplify issues associated with dead-volume.