Low-Dead-Volume Inlet for Vacuum Chamber

TBMG-7955

05/01/2010

Abstract
Content

Gas introduction from near-ambient pressures to high vacuum traditionally is accomplished either by multi-stage differential pumping that allows for very rapid response, or by a capillary method that allows for a simple, single-stage introduction, but which often has a delayed response. Another means to introduce the gas sample is to use the multi-stage design with only a single-stage. This is accomplished by using a very small conductance limit. The problem with this method is that a small conductance limit will amplify issues associated with dead-volume.

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Citation
"Low-Dead-Volume Inlet for Vacuum Chamber," Mobility Engineering, May 1, 2010.
Additional Details
Publisher
Published
May 1, 2010
Product Code
TBMG-7955
Content Type
Magazine Article
Language
English