Linear Stage Brings Speed and Precision to Semiconductor Inspection
TBMG-16213
04/01/2013
- Content
With some of the most demanding quality control regimens of any industry, semiconductor manufacturers use a variety of sophisticated metrology instruments to inspect wafers at each production step. All of these instruments have something in common: They simply will not function without precision motion stages.
- Citation
- "Linear Stage Brings Speed and Precision to Semiconductor Inspection," Mobility Engineering, April 1, 2013.