Magazine Article

Linear Stage Brings Speed and Precision to Semiconductor Inspection

TBMG-16213

04/01/2013

Abstract
Content

With some of the most demanding quality control regimens of any industry, semiconductor manufacturers use a variety of sophisticated metrology instruments to inspect wafers at each production step. All of these instruments have something in common: They simply will not function without precision motion stages.

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Citation
"Linear Stage Brings Speed and Precision to Semiconductor Inspection," Mobility Engineering, April 1, 2013.
Additional Details
Publisher
Published
Apr 1, 2013
Product Code
TBMG-16213
Content Type
Magazine Article
Language
English