Laser Metrology Heterodyne Phase-Locked Loop

A method reduces sensitivity to noise in a signal from a laser heterodyne interferometer. The phase-locked loop (PLL) removes glitches that occur in a zero-crossing detector’s output [that can happen if the signal-to-noise ratio (SNR) of the heterodyne signal is low] by the use of an internal oscillator that produces a square-wave signal at a frequency that is inherently close to the heterodyne frequency.