Interdigital Overlay Capacitors for Integrated Circuits

Interdigital overlay capacitors have been invented to decrease the amount of integrated-circuit chip area needed to accommodate a given amount of capacitance. In most very-large-scale integrated (VLSI) circuits and monolithic microwave integrated circuits (MMIC), the integrated capacitors are the largest circuit elements. By making it possible to fit the capacitors within smaller chip areas, this invention offers the potential to reduce the overall chip sizes, increase the numbers of circuit elements that can be accommodated on given chip areas, and/or satisfy increasingly stringent design constraints on the dimensions of circuit elements.