Magazine Article

An Innovative Material for In-Chamber Semiconductor Applications

TBMG-29936

06/01/1999

Abstract
Content

Vespel parts are made from a unique polymer by DuPont that has been called a problem solver for the semiconductor industry. Vespel SPC is a new generation of Vespel polyimide parts and shapes for semiconductor manufacturing, with improved performance and added value in etching chambers and other demanding wafer processing environments.

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Citation
"An Innovative Material for In-Chamber Semiconductor Applications," Mobility Engineering, June 1, 1999.
Additional Details
Publisher
Published
Jun 1, 1999
Product Code
TBMG-29936
Content Type
Magazine Article
Language
English