An Innovative Material for In-Chamber Semiconductor Applications
TBMG-29936
06/01/1999
- Content
Vespel parts are made from a unique polymer by DuPont that has been called a problem solver for the semiconductor industry. Vespel SPC is a new generation of Vespel polyimide parts and shapes for semiconductor manufacturing, with improved performance and added value in etching chambers and other demanding wafer processing environments.
- Citation
- "An Innovative Material for In-Chamber Semiconductor Applications," Mobility Engineering, June 1, 1999.