Inductive Non-Contact Position Sensor

Optical hardware has been developed to measure the depth of defects in the Space Shuttle Orbiter’s windows. In this hardware, a mirror is translated such that its position corresponds to the defect’s depth, so the depth measurement problem is transferred to a mirror-position measurement problem. This is preferable because the mirror is internal to the optical system and thus accessible. Based on requirements supplied by the window inspectors, the depth of the defects needs to be measured over a range of 200 microns with a resolution of about 100 nm and an accuracy of about 400 nm. These same requirements then apply to measuring the position of the mirror, and in addition, since this is a scanning system, a response time of about 10 ms is needed.