Improved Starting Materials for Back-Illuminated Imagers
TBMG-7740
06/01/2009
- Content
An improved type of starting materials for the fabrication of silicon-based imaging integrated circuits that include back-illuminated photodetectors has been conceived, and a process for making these starting materials is undergoing development. These materials are intended to enable reductions in dark currents and increases in quantum efficiencies, relative to those of comparable imagers made from prior silicon-on-insulator (SOI) starting materials.
- Citation
- "Improved Starting Materials for Back-Illuminated Imagers," Mobility Engineering, June 1, 2009.