Magazine Article

Improved Method of Manufacturing SiC Devices

TBMG-859

06/01/2005

Abstract
Content

The phrase, "common-layered architecture for semiconductor silicon carbide" ("CLASSiC") denotes a method of batch fabrication of microelectromechanical and semiconductor devices from bulk silicon carbide. CLASSiC is the latest in a series of related methods developed in recent years in continuing efforts to standardize SiC-fabrication processes. CLASSiC encompasses both institutional and technological innovations that can be exploited separately or in combination to make the manufacture of SiC devices more economical. Examples of such devices are piezoresistive pressure sensors, strain gauges, vibration sensors, and turbulence-intensity sensors for use in harsh environments (e.g., high-temperature, high-pressure, corrosive atmospheres).

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Citation
"Improved Method of Manufacturing SiC Devices," Mobility Engineering, June 1, 2005.
Additional Details
Publisher
Published
Jun 1, 2005
Product Code
TBMG-859
Content Type
Magazine Article
Language
English