Improved Fabrication of Lithium Films Having Micron Features
TBMG-47
08/01/2006
- Content
An improved method has been devised for fabricating micron-dimension Li features. This approach is intended for application in the fabrication of lithium-based microelectrochemical devices — particularly solid-state thinfilm lithium microbatteries.
- Citation
- "Improved Fabrication of Lithium Films Having Micron Features," Mobility Engineering, August 1, 2006.