Magazine Article

Improved Controller for a Three-Axis Piezoelectric Stage

TBMG-5635

9/1/2009

Abstract
Content

An improved closed-loop controller has been built for a three-axis piezoelectric positioning stage. The stage can be any of a number of commercially available or custom-made units that are used for precise three-axis positioning of optics in astronomical instruments and could be used for precise positioning in diverse fields of endeavor that include adaptive optics, fabrication of semiconductors, and nanotechnology.

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Citation
"Improved Controller for a Three-Axis Piezoelectric Stage," Mobility Engineering, September 1, 2009.
Additional Details
Publisher
Published
9/1/2009
Product Code
TBMG-5635
Content Type
Magazine Article
Language
English