Improved Controller for a Three-Axis Piezoelectric Stage
TBMG-5635
9/1/2009
- Content
An improved closed-loop controller has been built for a three-axis piezoelectric positioning stage. The stage can be any of a number of commercially available or custom-made units that are used for precise three-axis positioning of optics in astronomical instruments and could be used for precise positioning in diverse fields of endeavor that include adaptive optics, fabrication of semiconductors, and nanotechnology.
- Citation
- "Improved Controller for a Three-Axis Piezoelectric Stage," Mobility Engineering, September 1, 2009.