High-Reliability Radio Frequency MEMS Switch

The two types of MEMS switches — metal-to-metal contact and capacitive — are prone to failure because of sagging cantilever structures. Metal-to-metal contact switches consist of a metal transmission line and a metal bridge/cantilever that are separated by an air gap. The metal contacts in these switches are susceptible to wearing down and welding over time. Capacitive switches use both a thin insulator and an air gap between the transmission line and the bridge/cantilever, preventing the two metal structures from touching in an effort to stop the metal connects from welding together. Both of these types suffer from their reliance on metal bridge/cantilever structures that are prone to severe sagging and eventual failure through prolonged operations.