High-Performance Micromachined Linear Arrays of Thermopiles

Linear arrays of thermopile infrared detectors made of high-performance thermoelectric materials have been fabricated on silicon substrates by micromachining processes. Such detector arrays can be useful in dispersive spectrometers for chemical analyses, including exhaust and environmental monitoring, in inexpensive thermal imaging systems for predictive and preventative maintenance, such as looking for hot spots on train wheels or power generating equipment, and in horizon sensors for satellite attitude control.