Heterogeneous Integration Technology

Integrating different types of devices and materials could increase their functional density, improving the performance of electro-optic systems for sensor applications.

Air Force Research Laboratory, Wright-Patterson Air Force Base, Ohio

By definition, “heterogeneous integration” (HI) refers to the integration of dissimilar components on a common platform. The term is extensively used in very diverse applications to encompass efforts to make previously separate functions operate together by an intimate fusion of components. It can mean a seamless integration of previously incompatible software, database, drugs or machine parts. The particular definition that applies here is the integration of dissimilar sensor components onto a common substrate to make new compact components that provide enhanced characteristics.

IEEE defines Heterogeneous Integration to be “the integration of separately manufactured components into a higher-level assembly that, in the aggregate, provides enhanced functionality and improved operating characteristics”. In this definition, components should be taken to mean any unit whether individual die, micro-electromechanical systems (MEMS) device, passive component and assembled package or sub-system that are integrated into a single package. The operating characteristics should also be taken in its broadest meaning including characteristics such as system level performance and cost of ownership.