Fiber-Optic Sensor Would Monitor Growth of Polymer Film
TBMG-162
01/01/2005
- Content
A proposed optoelectronic sensor system would measure the increase in thickness of a film of parylene (a thermoplastic polymer made from para-xylene) during growth of the film in a vapor deposition process. By enabling real-time monitoring of film thickness, the system would make it possible to identify process conditions favorable for growth and to tailor the final thickness of the film with greater precision than is now possible.
- Citation
- "Fiber-Optic Sensor Would Monitor Growth of Polymer Film," Mobility Engineering, January 1, 2005.