Magazine Article

Fiber-Optic Sensor Would Monitor Growth of Polymer Film

TBMG-162

01/01/2005

Abstract
Content

A proposed optoelectronic sensor system would measure the increase in thickness of a film of parylene (a thermoplastic polymer made from para-xylene) during growth of the film in a vapor deposition process. By enabling real-time monitoring of film thickness, the system would make it possible to identify process conditions favorable for growth and to tailor the final thickness of the film with greater precision than is now possible.

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Citation
"Fiber-Optic Sensor Would Monitor Growth of Polymer Film," Mobility Engineering, January 1, 2005.
Additional Details
Publisher
Published
Jan 1, 2005
Product Code
TBMG-162
Content Type
Magazine Article
Language
English