Fabrication of Thin-Film Type-S Thermocouples

Processes for fabricating thin-film type-S thermocouples on metal and silicon nitride substrates (see figure) have been developed. (A type-S thermocouple comprises one leg made of platinum and the other leg made of an alloy of platinum with a rhodium content of 10 percent.) Thin-film type-S thermocouples can be used to measure temperatures on the surfaces of metal and ceramic components and are intended, especially, for use as monitoring and control sensors in the development and operation of advanced engines.