Fabricating Diffusion-Cooled Hot-Electron-Bolometer Elements
TBMG-32117
2/1/1998
- Content
Microbridges that constitute the superconducting-transition sensory elements of electron-diffusion-cooled hot-electron bolometers can now be fabricated in increased yield and quality. This improvement is made possible by a fabrication process that notably includes the use of a self-aligned mask during a critical etching step.
- Citation
- "Fabricating Diffusion-Cooled Hot-Electron-Bolometer Elements," Mobility Engineering, February 1, 1998.