Encapsulated Ball Bearings for Rotary Micro Machines

Microelectromechanical systems (MEMS)-fabricated silicon rotary elements for micro-motors, micro-generators, and micro-turbomachinery have received growing attention with applications in power conversion and actuation. Within these technologies, the bearing mechanism is the primary determinant of device performance and reliability. Active bearings, such as magnetic or electrostatic, have the advantage of being controlled during the operation, but at the cost of the accompanying circuitry. Passive bearings span a large range of velocities that include center-pin bushings with low revolution rates possible, and hydrostatic or hydrodynamic bearings with high revolution rates possible.