Double-Sided Si(Ge)/Sapphire/III-Nitride Hybrid Structures

TBMG-34888

08/01/2019

Abstract
Content

NASA Langley Research Center has developed a double-sided Si(Ge)/ Sapphire/III-Nitride hybrid structure. This technology uses both sides of a sapphire wafer to build device structures — on one side, making either Si or SiGe devices and on the other side, making III-Nitride device structures (e.g. GaN, InGaN, AlGaN).

Meta TagsDetails
Citation
"Double-Sided Si(Ge)/Sapphire/III-Nitride Hybrid Structures," Mobility Engineering, August 1, 2019.
Additional Details
Publisher
Published
Aug 1, 2019
Product Code
TBMG-34888
Content Type
Magazine Article
Language
English