Dimensional Metrology of Micro Parts by Optical Three-Dimensional Profilometry and Areal Surface Topography Analysis
16-226-11-1819
11/01/2012
- Content
- A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.
- Citation
- Senin, N., Blunt, L., and Tolley, M., "Dimensional Metrology of Micro Parts by Optical Three-Dimensional Profilometry and Areal Surface Topography Analysis," SAE Technical Paper 16-226-11-1819, 2012, .