Magazine Article

Determining Optical Material Parameters With Motion in Structured Illumination

TBMG-48963

09/01/2023

Abstract
Content

The broad need for determining the optical properties of thin films in a multitude of applications is usually served by ellipsometry. Practical application of ellipsometry generally requires prior constraints, typically in the form of a frequency-dependent model. To provide for a suitable solution of the inverse problem, where film parameters are determined from a set of optical measurements. We present motion in structured illumination as a means to obtain additional information and hence avoid the need for a material response model. Using this approach, inversion for multiple parameters at each wavelength becomes possible, and in a mutual information sense, this is achieved by taking intensity measurements at a known set of displacements in a cavity.

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Citation
"Determining Optical Material Parameters With Motion in Structured Illumination," Mobility Engineering, September 1, 2023.
Additional Details
Publisher
Published
Sep 1, 2023
Product Code
TBMG-48963
Content Type
Magazine Article
Language
English