Designing Purging Flows of Clean, Dry Gases
TBMG-6875
07/01/2000
- Content
A method of designing purging flows of clean, dry gases to maintain acceptably low levels of contamination in enclosed volumes has been developed. The method is applicable to diverse enclosures that must be kept clean, including housings of precise optical instruments, clinical facilities, facilities for manufacturing microelectronic devices, and clean rooms in general.
- Citation
- "Designing Purging Flows of Clean, Dry Gases," Mobility Engineering, July 1, 2000.