Magazine Article

Designing Purging Flows of Clean, Dry Gases

TBMG-6875

07/01/2000

Abstract
Content

A method of designing purging flows of clean, dry gases to maintain acceptably low levels of contamination in enclosed volumes has been developed. The method is applicable to diverse enclosures that must be kept clean, including housings of precise optical instruments, clinical facilities, facilities for manufacturing microelectronic devices, and clean rooms in general.

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Citation
"Designing Purging Flows of Clean, Dry Gases," Mobility Engineering, July 1, 2000.
Additional Details
Publisher
Published
Jul 1, 2000
Product Code
TBMG-6875
Content Type
Magazine Article
Language
English