Delta-Doped CCDs as Detector Arrays in Mass Spectrometers

Delta-doped, back-illuminated charge-coupled devices (CCDs) are used as detector arrays in high-performance double- focusing miniature mass spectrometers of Mattauch-Herzog design (described below). The uses of delta-doped CCD detector arrays eliminates the need for microchannel plates (MCPs) and the high-voltage power supplies, that, heretofore, have been used in detection schemes in mass spectrometers; this makes it possible to reduce the sizes, masses, and power demands of mass spectrometers. The use of delta-doped CCDs enables the direct and simultaneous measurement of ions with different masses separated along the focal plane.