Damage-Free Finishing of Silicon X-Ray Optics Using Magnetic Field-Assisted Finishing

Thin, segmented mirrors have been fabricated from monocrystalline silicon blocks. The material is economically viable, and is virtually free of internal stress because of its nearly perfect crystalline structure. The mirror surfaces will first be accurately figured and finished on thick silicon blocks, then sliced off at the desired thickness by wire electro-discharge machining. A finishing process has been conceived in which existing mirror-finishing processes are adapted to be capable of quickly and accurately figuring and finishing damage-free, segmented, monocrystalline silicon mirrors in a cost-efficient manner.