CVD of Diamond Using Magnetoplasmadynamic Sources
TBMG-6917
8/1/2000
- Content
A program of research and development is addressing the feasibility of using magnetoplasmadynamic (MPD) sources in the chemical vapor deposition (CVD) of synthetic diamond films. Because of its unique combination of thermal, electronic, mechanical, and chemical properties, diamond has potential for use as a coating material in numerous engineering and scientific applications.
- Citation
- "CVD of Diamond Using Magnetoplasmadynamic Sources," Mobility Engineering, August 1, 2000.