CSAM Metrology Software Tool
TBMG-418
07/01/2005
- Content
CSAM Metrology Software Tool (CMeST) is a computer program for analysis of false-color CSAM images of plastic-encapsulated microcircuits. ("CSAM" signifies C-mode scanning acoustic microscopy.) The colors in the images indicate areas of delamination within the plastic packages. Heretofore, the images have been interpreted by human examiners.
- Citation
- "CSAM Metrology Software Tool," Mobility Engineering, July 1, 2005.