Computer Code for Analysis of Stress in Silicon Wafers

The MacWafer™ code computes gravitational and thermal stresses in silicon wafers and uses these results to determine the maximum allowable temperature variation across a wafer, maximum processing temperatures, and maximum allowable heating and cooling rates. This information is of particular interest in the case of processing 300-mm wafers coupled with fast ramp technologies. The program runs interactively on Apple Macintosh, IBM PC, and PC clones, and workstation computers as well. Execution time is typically about 20 seconds on a Motorola 68040 processor operating at 33 MHz.