Cleaning Carbon Nanotubes by Use of Mild Oxygen Plasmas
TBMG-1644
03/01/2006
- Content
Experiments have shown that it is feasible to use oxygen radicals (specifically, monatomic oxygen) from mild oxygen plasmas to remove organic contaminants and chemical fabrication residues from the surfaces of carbon nanotubes (CNTs) and metal/CNT interfaces. A capability for such cleaning is essential to the manufacture of reproducible CNT-based electronic devices.
- Citation
- "Cleaning Carbon Nanotubes by Use of Mild Oxygen Plasmas," Mobility Engineering, March 1, 2006.