Circuit Generates Rotation Signal From a Vibratory Gyroscope

This is the first of four articles that address various issues concerning the generation and utilization of electronic signals in the operation of micromachined planar vibratory microgyroscopes and other sensory devices that include electrostatically actuated, capacitively sensed mechanical resonators. The subject of this article is that part of the overall electronic circuitry of a planar vibratory gyroscope that generates a signal proportional to the rate of rotation.