Catalytic-Metal/ PdOₓ/SiC Schottky-Diode Gas Sensors
TBMG-1580
4/1/2006
- Content
Miniaturized hydrogen- and hydrocarbon- gas sensors, heretofore often consisting of Schottky diodes based on catalytic metal in contact with SiC, can be improved by incorporating palladium oxide (PdOx, where 0≤x≤1) between the catalytic metal and the SiC.
- Citation
- "Catalytic-Metal/ PdOₓ/SiC Schottky-Diode Gas Sensors," Mobility Engineering, April 1, 2006.