Better Electrochemical Profiling of III-V Semiconductors

An etching and electrolyte solution called "UNIEL" has been found to be useful for electrochemical characterization as a function of depth ("electrochemical profiling" for short) of semiconductor compounds of elements from periods III and V of the periodic table; that is, InP- and GaAs-based semiconductors. UNIEL is a mixture of three solutions denoted A, B, and C in the volume proportions of 1, 4, and 1, respectively. The compositions of these solutions are the following: