Magazine Article

A New Process for Fabricating Random Silicon Nanotips

TBMG-377

11/01/2004

Abstract
Content

An improved process for the fabrication of random arrays of silicon nanotips has been demonstrated to be feasible. Relative to other such processes, this process offers advantages of low cost and simplicity. Moreover, this process can readily be combined with other processes used to fabricate integrated circuits and other monolithic silicon structures.

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Citation
"A New Process for Fabricating Random Silicon Nanotips," Mobility Engineering, November 1, 2004.
Additional Details
Publisher
Published
Nov 1, 2004
Product Code
TBMG-377
Content Type
Magazine Article
Language
English