A New Process for Fabricating Random Silicon Nanotips
TBMG-377
11/01/2004
- Content
An improved process for the fabrication of random arrays of silicon nanotips has been demonstrated to be feasible. Relative to other such processes, this process offers advantages of low cost and simplicity. Moreover, this process can readily be combined with other processes used to fabricate integrated circuits and other monolithic silicon structures.
- Citation
- "A New Process for Fabricating Random Silicon Nanotips," Mobility Engineering, November 1, 2004.