Low-Cost Detection of Thin Film Stress During Fabrication
- Magazine Article
- TBMG-36868
Sector:
Language:
- English
Topic:
NASA’s Marshall Space Flight Center has developed a simple, cost-effective optical method for thin film stress measurements during growth and/or subsequent annealing processes. Stress arising in thin film fabrication presents production challenges for electronic devices, sensors, and optical coatings; it can lead to substrate distortion and deformation, impacting the performance of thin film products.