Q&A: Innovative Linear Electrostatic MEMS Actuator

TBMG-35437

11/01/2019

Abstract
Content

Shahrzad (Sherry) Towfighian is Associate Professor of Mechanical Engineering at Binghamton University's Thomas J. Watson School of Engineering and Applied Sciences. She and her team have developed a capacitive MEMS actuator with a linear transfer characteristic that will enable major improvements in the manufacture of microphones and other MEMS devices such as gyroscopes and accelerometers.

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Citation
"Q&A: Innovative Linear Electrostatic MEMS Actuator," Mobility Engineering, November 1, 2019.
Additional Details
Publisher
Published
Nov 1, 2019
Product Code
TBMG-35437
Content Type
Magazine Article
Language
English