All-Silicon MEMS Inertial Sensing at Fiber Optic Gyro Performance Levels

  • Magazine Article
  • TBMG-35195
Published September 01, 2019 by Tech Briefs Media Group in United States
  • English

There is increasing demand in many high-end commercial and industrial markets for precision motion sensing for a diversity of applications. In particular, demand is growing for effective guidance and stabilization in applications with severe limitations on space and/or weight, or available budget. UK/Japanese joint venture, Silicon Sensing Systems, has developed a high-performance all-silicon micro-electro-mechanical systems (MEMS) gyro in response to this demand.