Excimer Laser Micromachining/Marking

892257

09/01/1989

Event
Aerospace Technology Conference and Exposition
Authors Abstract
Content
The present generation of industrial ultraviolet light (UV) excimer lasers are being used in a growing number of demanding production and prototype application work that had previously been beyond the capabilities of such thermal sources as CO2, operating at 10.6 μm, or Nd:YAG and Nd:Glass, operating at 1.06 μm range. The high photon energy and the very short duration of the excimer pulses can efficiently initiate photochemical and/or photothermal surface reactions leading to precision micromachining, indelible marking, and microstructure modification.
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Details
DOI
https://doi.org/10.4271/892257
Pages
10
Citation
Scaggs, M., Sowada, U., and Andrellos, J., "Excimer Laser Micromachining/Marking," SAE Technical Paper 892257, 1989, https://doi.org/10.4271/892257.
Additional Details
Publisher
Published
Sep 1, 1989
Product Code
892257
Content Type
Technical Paper
Language
English