Excimer Laser Micromachining/Marking
892257
09/01/1989
- Event
- Content
- The present generation of industrial ultraviolet light (UV) excimer lasers are being used in a growing number of demanding production and prototype application work that had previously been beyond the capabilities of such thermal sources as CO2, operating at 10.6 μm, or Nd:YAG and Nd:Glass, operating at 1.06 μm range. The high photon energy and the very short duration of the excimer pulses can efficiently initiate photochemical and/or photothermal surface reactions leading to precision micromachining, indelible marking, and microstructure modification.
- Pages
- 10
- Citation
- Scaggs, M., Sowada, U., and Andrellos, J., "Excimer Laser Micromachining/Marking," SAE Technical Paper 892257, 1989, https://doi.org/10.4271/892257.