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New Sensor Concepts Using Vibrating Cantilevers
ISSN: 0148-7191, e-ISSN: 2688-3627
Published February 01, 1988 by SAE International in United States
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Two new, sensor concepts using small, piezoelectrically driven, vibrating cantilever blades are described. A magnetic-field sensor is realised by depositing a multiturn planar coil of aluminum on the blade. When the blade is driven at a cantilever resonance (1–3 kHz) in the presence of a magnetic field, an ac emf is induced in the coil proportional to the field strength at the site of the coil, Operation is exactly analogous to that of an ac generator. In a gas-sensitive device, an air gap is established by placing the blade of the cantilever a few millimeters from a multilayer ceramic piezoelectric actuator. When the actuator is driven at the resonance frequency of the blade, the vibration induced in the blade by means of the gas coupling is “read out” with a piezoelectric element attached to the base of the blade. The pressure or average atomic mass of the gas can be sensed by monitoring the amplitude of the blade.
CitationHetrick, R., "New Sensor Concepts Using Vibrating Cantilevers," SAE Technical Paper 880556, 1988, https://doi.org/10.4271/880556.
- Howe, R. T. Resonant Microsensors, Digest of Technical Papers 4 th International Conference on Solid-State Sensors and Actuators (Transducers '87) Tokyo 1987 843
- Numerous examples of sensors based on resonant structures as well as a discussion of fabrication techniques can be found in the Digest of Technical Papers 4 th International Conference on Solid-State Sensors and Actuators (Transducers '87) Tokyo 1987
- Podemski, M. The Emergence of a New Sensor for Ignition Timing SAE paper 870471 1987
- Lao B.Y. Chicot, B. Ported-Enclosure Vibrating-Diaphragm Pressure Sensor SAE paper 810375 1981
- Vogel, R. F. Dual Crystal Gas Density Sensor Sensors and Acutators 5 1984 21 28
- Meyer E. Neumann E. G. Physical and Applied Acoustics Academic Press New York 1972