Sputtering and Ion Plating as Industrial Processes

730547

02/01/1973

Authors
Abstract
Content
Ion plating and sputtering offer materials engineers versatile coating methods. Both processes use a controlled pressure chamber and vacuum equipment. Sputtering is essentially a line of sight deposition method. The coating material is partially ionized, following electrical lines of force, during ion plating, uniformly coating the substrate configuration. Both processes-their applications and advantages-are discussed. Although the processes are not economically competitive with electroplating or other conventional coating methods, the properties they provide may offset the costs.
Meta TagsDetails
DOI
https://doi.org/10.4271/730547
Pages
4
Citation
Stupp, B., "Sputtering and Ion Plating as Industrial Processes," SAE Technical Paper 730547, 1973, https://doi.org/10.4271/730547.
Additional Details
Publisher
Published
Feb 1, 1973
Product Code
730547
Content Type
Technical Paper
Language
English