Evaluation of Non-Contact Wall Temperature Measurement Using MEMS Wireless Sensor

In this paper, we report the design, fabrication, and performance evaluation of MEMS wireless temperature sensor, which can be applied to the wall temperature measurement in combustors. The sensor is composed of a LCR resonant circuit and its coil is inductively coupled with an external read-out coil for the wireless sensing. Electrical resistance change of the coil due to the temperature change is used to measure the wall temperature. A prototype sensor is fabricated with MEMS technologies and its performance is evaluated in the temperature range of 25 - 200 °C. The measured sensitivity is found to be 2.5 °C at 177 °C, when the distance between the sensor and the readout coil is 1.77 mm.