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MEMS Sensor for Particulate Matter Measurement of Exhaust Gas
Technical Paper
2013-01-0011
ISSN: 0148-7191, e-ISSN: 2688-3627
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English
Abstract
To meet Euro6 regulation particulate matter MEMS sensor is suggested. This sensor detects induced charges by PM. To increase sensitivity of the sensor, surface area of the sensor is increased by MEMS process. Sensor is made by low resistive silicon. Total size is 4.3 mm x 59.4 mm x 1 mm and size of sensor part is 4.3 mm x 13 mm. On the backside of the sensor, Pt heater is fabricated to remove piled PM on sensor part. After sensor part, charge amplifier is used to measure the induced charge of the sensor. From FFT of sensor signal, it can sense 5.46 mg/m₃ of PM. In this paper, MEMS devices for exhaust system monitoring of automobiles are investigated. PM emitted from diesel engine is charged particle. Charge-induced-type PM sensor we designed can measure by real time and it doesn't need particle collection apparatus
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Lim, S., Kwon, S., Chun, K., Yoo, S. et al., "MEMS Sensor for Particulate Matter Measurement of Exhaust Gas," SAE Technical Paper 2013-01-0011, 2013, https://doi.org/10.4271/2013-01-0011.Also In
References
- Jang K. et al. Design of a charge induced type MEMS sensor for particulate matter measurement of on board diagnostics ICEIC 2012
- Chun K. et al. MEMS for TPMS and Exhaust of Automobiles Sensors 2012 2012
- Dorfmueller Lutz et al. Resistive particle sensors having measuring electrodes US Patent, US 7,872,466 B2 Jan. 18 2011
- Weinheimer A. J. The charge induced on a conducting cylinder by a point charge and its application to the measurement of charge on precipitation Journal of Atmospheric and Oceanic Technology 5 2 298 304 1988
- Shao J. Velocity measurement of pneumatically conveyed particles using intrusive electrostatic sensors Instrumentation and Measurement, IEEE Transactions on 59 5 1477 1484 2010
- Se K. Particulate Matter MEMS Sensor for On Board Diagnosis ITC-CSCC 2012
- Jung H. et al. Measurement of electrical charge on diesel particles Aerosol Science and Technology 39 12 1129 1135 2005