Applications of Digital Holography to Microstructures

Non contact and full field optical measuring techniques have become an important tool for investigating microstructures. Generally, either the phase or the amplitude of light reflected from a surface is analyzed. As a consequence 3D information can only be received by using scanning techniques.

Digital holography offers the simultaneous measurement of amplitude and phase and therefore allows complete measurement without scanning procedures. This feature allows new applications, esp. if objects are moving or even vibrating. In this paper we will show the principle and some examples of the application of digital holography.