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Static and Dynamic Instabilities of Electrostatic Actuated MEMS Devices

Journal Article
2008-01-0915
ISSN: 1946-4614, e-ISSN: 1946-4622
Published April 14, 2008 by SAE International in United States
Static and Dynamic Instabilities of Electrostatic Actuated MEMS Devices
Sector:
Citation: Beloiu, D., "Static and Dynamic Instabilities of Electrostatic Actuated MEMS Devices," SAE Int. J. Passeng. Cars - Electron. Electr. Syst. 1(1):307-322, 2009, https://doi.org/10.4271/2008-01-0915.
Language: English

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