Micromachined Servo Accelerometer for Harsh Environments

2001-01-1583

04/30/2001

Event
SAE 2001 Noise & Vibration Conference & Exposition
Authors Abstract
Content
Endevco has developed the Model MSA100A micromachined servo accelerometer. It utilizes a force-balance approach that demonstrates superior performance over a conventional “open loop”. the accelerometer is small and rugged, with superior low frequency response down to DC. It has been optimized to provide low level measurements in the presence of severe vibrational inputs and temperatur e extremes after being subjected to large shock impacts.
This paper details the design and operational features of the sensor element. The micromachined silicon sensor uses MEMS technology (microelectromechanical systems) in its fabrication. Also described is the electronic circuit used in the force-balance system, as well as the packaging of the accelerometer. Test results and application experience are presented.
Meta TagsDetails
DOI
https://doi.org/10.4271/2001-01-1583
Pages
9
Citation
Connolly, T., "Micromachined Servo Accelerometer for Harsh Environments," SAE Technical Paper 2001-01-1583, 2001, https://doi.org/10.4271/2001-01-1583.
Additional Details
Publisher
Published
Apr 30, 2001
Product Code
2001-01-1583
Content Type
Technical Paper
Language
English