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Angular Rate Sensor Based on Single Ended Quartz Tuning Fork
Technical Paper
1999-01-1038
ISSN: 0148-7191, e-ISSN: 2688-3627
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English
Abstract
The design methodology and process technologies used for an angular rate sensor designed for automotive applications are shown. By combining different high volume proven manufacturing processes from watch crystal and Airbag-Sensor production, it was possible to industrialize a sensor principle where the basic theoretical work on a single ended tuning fork was done in the past [1]. Due to the complexity of the sensor function and high safety requirements of customers, common FMEA (Failure Mode Effect Analysis) methods like theoretical analysis of the design have been extended by hardware verification techniques. As a result the sensor not only fulfills technical specification parameters, but also large volume production and specific design validation requirements which are required for safety critical applications.
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Citation
Hilser, R., Ernst, R., Schnell, J., Wolpert, R. et al., "Angular Rate Sensor Based on Single Ended Quartz Tuning Fork," SAE Technical Paper 1999-01-1038, 1999, https://doi.org/10.4271/1999-01-1038.Also In
References
- Söderkvist J. „Piezoelectric Beams and Vibrating Angular Rate Sensors” Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 38 3 May 1991
- Ichinose Toshihiko Terada Jiro „Angular Rate Sensor for Automotive Application” SAE'95, no. 950535 49 1995
- Reppich A. Willig R. „YAW Rate Sensor for Vehicle Dynamics Control System” SAE'05, no. 950537 67 1995
- Sparks D.R. Zarabadi S.R. Johnson J.D. Jiang Q. Chia M. Larsen O. Higdon W. Casttillo-Borelley P. „A CMOS Integrated Surface Micromachined Angular Rate Sensor: It's Automotive Applications” 851 1997
- Lutz M. Golderer W. Gerstenmeier J. Marek J. Maihöfer B. Mahler S. Münzel H. Bischof U. „A Precision YAW Rate Sensor in Silicon Micromaching” 847 1997