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Abe, Ryuichirou
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New MEMS Process Technology for Pressure Sensors Integrated with CMOS Circuits

Published 2014-04-01 by SAE International in United States
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Thin-Film Air Flow Sensors for Automotive using the MEMS Technologies

SAE International Journal of Passenger Cars - Electronic and Electrical Systems

  • Journal Article
  • 2015-01-0233
Published 2015-04-14 by SAE International in United States
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