Smart, Hybrid Actuators Combine Nanometer Precision, Large Forces, and Long Travel Ranges with High Dynamics

  • Magazine Article
  • TBMG-35290
Published October 01, 2019 by Tech Briefs Media Group in United States
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Language:
  • English

The characteristics of hybrid drives present a practical solution when a position needs to be detected with high precision and moved repeatedly over long travel ranges, or when a target position needs to be reached with nanometer precision. Application areas include precision movement of telescopes, microscopy, surface inspection, semiconductor manufacturing, and laser technology.