Smart, Hybrid Actuators Combine Nanometer Precision, Large Forces, and Long Travel Ranges with High Dynamics
- Magazine Article
- TBMG-35290
Sector:
Language:
- English
Topic:
The characteristics of hybrid drives present a practical solution when a position needs to be detected with high precision and moved repeatedly over long travel ranges, or when a target position needs to be reached with nanometer precision. Application areas include precision movement of telescopes, microscopy, surface inspection, semiconductor manufacturing, and laser technology.